New Atomic Ion SIMS Facility at the Naval Research Laboratory

Abstract:

Mass spectrometry of particulates and few micrometer regions of samples by Secondary Ion Mass Spectrometry (SIMS) is a very useful analytical tool. However, there are limitations caused by interferences from molecular species, such as hydrides, oxides, and carbides. Above mass 90 u, these interferences (> 10⁴ M/ΔM) can exceed the resolving power of SIMS. Accelerator Mass Spectrometry (AMS) is capable of eliminating such molecular ion interferences, but lacks spatial information and generally requires use of negative ions. This requirement limits its sensitivity, since actinide and lanthanide elements preferentially generate positive atomic ions (~10⁴ : 1). The Naval Research Laboratory (NRL) has installed a hybrid SIMS-AMS system, using a Single Stage AMS as a replacement for the normal Cameca IMS 4f SIMS electron multiplier detector. The NRL design enables analysis of either positive or negative ions. Thus, this system offers the potential to provide SIMS-like particle and micro-scale analysis without a forest of signals from molecular species, and is capable of measuring important positive atomic ions. This should improve measurement sensitivity and precision to determine isotopic distributions of actinides, lanthanides, and transition metals; and elemental abundances of trace species in particles or small features. Initial measurements show that molecule intensities can be reduced by seven orders of magnitude while atomic ion intensities are only diminished ~50%. We have chosen to call this instrument an atomic ion SIMS, or ai-SIMS, for short. The effect of basic operational parameters such as ion energy, charge state, molecule destruction gas and its pressure will be described, and examples of the benefits and capabilities of ai-SIMS will be presented.